Electron Microprobe

CAMECA SX51 Electron Microprobe

RECOMMENDED SAMPLE SIZE : Polished blocks - 35mm or 25mm diameter x 20mm max height. Polished Slides - 47 x 25mm OR 75 x 50mm OR 75 x 25mm and ~ 2mm thick.

The microprobe, sometimes referred to as EPMA (electron probe microanalysis) or simply "probe" analysis is equipped as follows:

• SAMx Analysis and control software.
• Four Wavelength dispersive spectrometers. [Two dual crystal and two four crystal spectrometers]
• Gresham Serius ultra thin window EDS spectrometer.
• Solid state backscattered electron detector.
• Secondary electron detector.
• Reflected, transmitted and polarized light sample imaging.
• Anti-contaminator.

The CAMECA SX51 Microprobe is a very powerful tool in electron microscopy. Microprobe has a number of significant advantages over a conventional SEM:

• Superior energy resolution using Wavelength dispersive X-ray analysis i.e. 10eV (cf 140eV with conventional EDXS), enabling the researcher to resolve problematic overlaps during analysis of X-ray spectra.
• Capacity to provide quantitative elemental analysis via calibration of x-ray data against reference standard materials.
• Ability to map/image over large areas, i.e. up to 75mmx50mm.
• Improved capability for multi-element imaging. Whilst major elements are being imaged using the integrated EDS software trace elements requiring better detection limits or energy resolution are being mapped using WDS at the same time.
• Capability to obtain a high number of analyses from multiple line scans, points, grid arrays and images due to the automated stage and analytical software.

Microanalysis has been applied predominantly in the earth sciences but increasingly for materials and biomaterials applications.

The following images analysed over a 13x13mm area provide elemental x-ray map of a Garnet mineral from the Mt Isa region of Qld. (click on image for larger versions).

Magnesium	Calcium
Iron	Manganese

CAMECA SX51 column showing the four WDS detectors and EDS detector